Koeber, S. et al. Photon. Lithium niobate etching is not required for making the hybrid optical waveguides. 6, 6982 (2000). B. Attojoule optoelectronics for low-energy information processing and communications. 35, 346396 (2017). Preprint at https://arxiv.org/abs/1803.10365 (2018). The modulators enable efficient electro-optic driving of high-Q photonic cavity modes in both adiabatic and non-adiabatic regimes, and allow us to achieve electro-optic switching at 11 Gb s1 with a bit-switching energy as low as 22 fJ. Lee, M. et al. Opt. Bryan Kelly on Twitter: "RT @OpticaPubsGroup: View Spotlight analysis Sci. 6, 488503 (2012). the best experience, we recommend you use a more up to date browser (or turn off compatibility mode in Optica 6, 845853 (2019). The measured electrical BER is 3.6105, limited by the signal distortion from the electronic circuit. carried out the device characterization. 1g) at 1604.13nm (not shown) with a loaded optical Q of 3.03104. a Laser-scanned transmission spectrum in the telecom band. Abstract. After the residue removal, we used diluted hydrofluoric acid to undercut the buried oxide layer to form a suspended photonic-crystal membrane structure (Fig. Top. IEEE Photonics Technol. & Nakano, S. High-speed modulator for next-generation large-capacity coherent optical networks. With these devices, we are able to demonstrate efficient electrical driving of high-Q cavity mode in both adiabatic and non-adiabatic regimes and to observe transition in between. b, c Eye diagrams of the photonic-crystal EOM output, measured with 271 NRZ PRBS with a driving voltage of Vpp=2V. The laser wavelength was locked at half wave into the cavity resonance. Nature 568, 373377 (2019). 25, 458460 (1974). Our EO modulators use MgO-doped lithium niobate for high power operation. The blue open circles show the dielectric and air bands. Lithium niobate photonic-crystal electro-optic modulator. Ayata, M. et al. The researchers combined the laser with a 50 gigahertz electro-optic modulator in lithium niobate to build a high-power transmitter. PubMed Weigel, P. O. et al. Silicon optical modulators. Ayata, M. et al. The electrodes are designed to have a length of 30m to ensure a full coverage of the applied electric field over the entire photonic-crystal structure. Photonics 2, 433437 (2008). Compact MZI modulators on thin film Z-cut lithium niobate As such, the photonic-crystal mirror on the right side of the defect cavity is designed to be of 100% reflection, while that on the left side has decreased number of holes (Fig. Wood, M. G. et al. Nat. To characterize the optical and electro-optic properties of the devices, a continuous-wave tunable laser (Santec TSL-510) was launched onto the chip via a lensed fiber. For simplicity of testing, the EOM is designed such that light is coupled into and out of the EOM via only one side of the cavity (Fig. 314, 317 (2014). A 10-Gbit/s lithium niobate intensity module provides chirp-free modulation at 1550 nm. M.Z. Shakoor, A. et al. The scale bar on the left represents the strength of normalized electrical field (Enorm) for d, f, g. The photonic-crystal cavity is oriented along the y-axis such that the dominant optical field is in parallel with the optical axis of underlying LN medium (Fig. We are also able to achieve high-speed electro-optic switching of at 11Gbs1, with switching energy as low as 22fJ per bit. Extended Data Fig. conceived the experiment. This Perspective discusses and compares several different approaches to the design of high-bandwidth, low-voltage electro-optic devices, such as Mach-Zehnder modulators, made using thin-film lithium niobate (TFLN) and strategies for their incorporation as part of a larger photonic integrated circuit (PIC). Gap denotes the spacing between the gold electrode and the LN cavity, and tw denotes the thickness of the waveguide wing layer. This value is the smallest switching energy ever reported for LN EOMs1,13,14,15,16,17,18,19,20,21,22,23,24,25,26, clearly showing the high energy efficiency of our devices. Song, M., Zhang, L., Beausoleil, R. G. & Willner, A. E. Nonlinear distortion in a silicon microring-based electro-optic modulator for analog optical links. Opt. As an example application, we applied NRZ signal with a (271)-bit pseudo-random binary sequence (PRBS) to an EOM with a Vpp of 2.0V. Figure7b, c shows the recorded eye diagrams at two different bit rates of 9 and 11Gbs1, respectively, which show clear open eyes. In summary, we have demonstrated high-speed LN EOMs with a broad modulation bandwidth of 17.5GHz, a significant tuning efficiency up to 1.98GHzV1, and an electro-optic modal volume as small as 0.58m3. The demonstration of energy efficient and high-speed EOM at the wavelength scale paves an important step for device miniaturization and high-density photonic integration on the monolithic LN platform, which is expected to find broad applications in communication, computing, microwave signal processing, and quantum photonic information processing. Top. Integrated Electro-Optic Modulator in Z-Cut Lithium Niobate Thin Film supervised the project. Here, we make an important step towards miniaturizing functional components on this platform, reporting high-speed LN electro-optic modulators, based upon photonic crystal nanobeam resonators. c, d, Numerically simulated microwave (c) and optical (d) field distributions (both shown in Ez components) in the cross-section of the thin-film modulator. Nature (Nature) Aoki, M. et al. 1a), where an injector section (Fig. High performance optical modulator based on electro-optic polymer filled silicon slot photonic crystal waveguide. Poberaj, G., Hu, H., Sohler, W. & Gnter, P. Lithium niobate on insulator (LNOI) for micro-photonic devices. 100GHz siliconorganic hybrid modulator. Jian, J. et al. Schmidt, R. V. & Kaminow, I. P. Metal-diffused optical waveguides in LiNbO3. Recently, thin-film lithium niobate (LN) emerges as a promising platform for photonic integrated circuits. 101, 151117 (2012). Thanks to the strong light confinement, we are able to place the electrode fairly close to the cavity without introducing extra optical loss (Fig. ADS The modulators are manufactured upon a commercial x-cut lithium niobate on isolator (LNOI) wafer (NANOLN) with a thin-film LN thickness of 500 nm, which is bonded to a buried silica (SiO 2) layer on a 500-m-thick silicon (Si) substrate. Science 318, 15671570 (2007). Among various device geometries, photonic-crystal nanoresonators are particularly beneficial in this regard, given their exceptional capability of controlling light confinement and lightmatter interactions on the sub-wavelength scale. 6, 488503 (2012). Azadeh, S. S. et al. Wooten, E. L. et al. The region highlighted in red is the electrode used to drive the photonic-crystal nanoresonator. Lett. & Fan, S. Complete optical isolation created by indirect interband photonic transitions. Di Zhu, and Mengjie Yu, from SEAS, Hannah R. Grant, Leif Johansson from Freedom Photonics and Lingyan He and Mian Zhang from HyperLight Corporation. 8b. New light sheet holography overcomes the depth perception challenge in 3D holograms, First-of-its-kind metalens can focus extreme ultraviolet light, An unprecedented look at biological energy on the sub-cellular level, Harvard John A. Paulson School of Engineering and Applied Sciences. The broad modulation bandwidth of these devices would thus enable high-speed electro-optic switching. has protected the intellectual property arising from the Loncar Labs innovations in lithium niobate systems. The devices exhibit a significant tuning efficiency up to 1.98 GHz V1, a broad modulation bandwidth of 17.5 GHz, while with a tiny electro-optic modal volume of only 0.58 m3. Microwave-to-optical conversion using lithium niobate thin-film acoustic resonators. Lithium Niobate Nonlinear Thermal Waveguide MODE Automation API Nonlinear Optics Photonic Integrated Circuits - Active Computing Second-harmonic generation (SHG) in a Lithium Niobite - LiNbO3 (LNO) nanophotonic waveguide is studied using temperature modulation to achieve efficient phase matching. Rep. 7, 46313 (2017). 7a shows another example of a device with optical Q of 20,000, which exhibits a 3-dB bandwidth of about 12.5GHz. Nat. CAS 1e), with the lattice constant varying from 450 to 550nm, is designed and placed in front of the left mirror to reduce the coupling loss. Slider with three articles shown per slide. Science 358, 630632 (2017). Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The best-known electro-optic Pockels material is probably lithium niobate (LiNbO3, LN), which has been widely used in telecommunication1. Abstract: In this paper, we demonstrate up to 260-GBaud single-wavelength coherent transmission by employing an optical transmitter based on two wide-bandwidth devices: a novel 260-GS/s arbitrary waveform generator with a 10-dB bandwidth of 90-GHz and a thin-film Lithium Niobate I/Q modulator with a 3-dB bandwidth of 110-GHz. Express 23, 2274622752 (2015). Chen, X. et al. In the meantime, to ensure continued support, we are displaying the site without styles Lithium niobate photonic-crystal electro-optic modulator Now, researchers from the Harvard John A. Paulson School of Engineering and Applied Sciences (SEAS) in collaboration with industry partners at Freedom Photonics and HyperLight Corporation, have developed the first fully integrated high-power laser on a lithium niobate chip, paving the way for high-powered telecommunication systems. High-quality lithium niobate photonic crystal nanocavities. 50-Gb/s silicon optical modulator. In this lesson the chirp induced by the LiNbO3 is analyzed based on the voltage of operation. Top. The insertion loss from the on-chip coupling waveguide to the photonic-crystal cavity is measured to be around 2.2dB, calibrated by subtracting the facet coupling and circulator transmission loss. When the EOM is driven at a modulation frequency of 600MHz much smaller than the cavity linewidth of 1.4GHz, increasing the driving power simply broadens the transmission spectrum into one with two shallow side lobes, as shown in Fig. Internet Explorer). Zhang, M. et al. When the modulation frequency is below 1.0GHz, The transmission spectrum remains fairly similar regardless of modulation frequency, as expected from the adiabatic driving discussed above. & Fathpour, S. Compact lithium niobate electrooptic modulators. IEEE Photon. Open Access Lett. performed numerical simulations. Light Sci. J. Lightwave Technol. 1e). The pure linear electro-optic tuning shown in Fig. Scaling an EOM down to a small footprint would reduce the device capacitance and thus decrease the switching energy27,28, which is indispensable for all practical applications. Generation of ultrastable microwaves via optical frequency division. Science 358, 630632 (2017). ADS For example, LNOI phase modulators with relatively low The orange curve in Fig. Notomi, M., Nozaki, K., Shinya, A., Matsuo, S. & Kuramochi, E. Toward fJ/bit optical communication in a chip. This phenomenon is shown more clearly in Fig. BER versus OSNR for the three modulation schemes at 70Gbaud. CAS Nature 528, 534538 (2015). Integrated lithium niobate photonics is a promising platform for the development of high-performance chip-scale optical systems, but getting a laser onto a lithium niobate chip has proved to be one of the biggest design challenges, said, , the Tiantsai Lin Professor of Electrical Engineering and Applied Physics at SEAS and senior author of the study. This work was performed in part at the Cornell NanoScale Facility, a member of the National Nanotechnology Coordinated Infrastructure (National Science Foundation, ECCS-1542081). As shown in Fig. 9, 172194 (2015). Rao, A. et al. For microwave simulations, the electric-field values are obtained when a voltage of 1V is applied across the two electrodes. If you find something abusive or that does not comply with our terms or guidelines please flag it as inappropriate. This work demonstrates the first (to the best of our knowledge) thin film lithium niobate electro-optic modulator operating at a wavelength of 1064 nm. Chirp in Mach-Zehnder Lithium Niobate Modulators - Optiwave This is in strong contrast to piezoelectric acoustic modulation which is confined to the vicinity of mechanical resonance frequency45,49,50. [29] Owing to the disparity between the dielectric constants of lithium niobate and silica, the electrical field primarily affected the LN core through the slab. 20, 150157 (2014). C.W., M.Z., X.C. The detector output was recorded either by a microwave network analyzer (Keysight N5235B) for characterizing the modulation bandwidth or by a sampling oscilloscope module (Keysight 54754A) to record the eye diagram of the switching signal. 24, 234236 (2012). and JavaScript. Here we overcome these limitations and demonstrate monolithically integrated lithium niobate electro-optic modulators that feature a CMOS-compatible drive voltage, support data rates up to 210 gigabits per second and show an on-chip optical loss of less than 0.5 decibels. . Rev. 100G/400G LN Modulator. Science 347, 14231424 (2015). Thin-film lithium niobate electro-optic modulators: To etch or not to Guarino, A., Poberaj, G., Rezzonico, D., GeglInnocenti, R. & Gnter, P. Electro-optically tunable microring resonators in lithium niobate. Express 27, 1873118739 (2019). Such flexibility allows us to observe direct transition between the adiabatic driving regime and the non-adiabatic regime simply by continuously sweeping the modulation frequency to across the cavity linewidth. 1a) since it supports compact optical and electrical integration to enhance the electro-optic response. | 617-496-1351 | lburrows@seas.harvard.edu, Method can depict holograms viewable from any angle as if physically present with continuous depth, Nanofabrication technique, using holes to create vacuum guides, breaks a barrier in optics, Applied Physics, Optics / Photonics, Quantum Engineering, By detecting nanoscopic heat changes inside cells, first-of-their-kind sensors reveal how living systems use energy, Applied Physics, Bioengineering, Health / Medicine, Materials, 150 Western Ave, Allston, MA 02134 Commun. Top. Liu, K., Ye, C. R., Khan, S. & Sorger, V. J. Thin-Film Lithium Niobate Modulator Sets New Performance Records The sum of all gray curves is showed in red, which is fitted by the theory. Li, M., Liang, H., Luo, R., He, Y. 42.70.a. IEEE J. Sel. The light reflected from the EOM was collected by the same lensed fiber, routed by a circulator, and then delivered to a photodiode for detection. Numerical simulations show that the device exhibits a small capacitance C of C=~22fF, which is more than one order of magnitude smaller than other LN EOMs1,13,14,15,16,17,18,19,20,21,22,23,24,25,26. However, the dielectric constant of LN is ~28 at a microwave frequency, much larger than that of air. Thank you for visiting nature.com. B. Rao, A. et al. Electro-optic modulator (EOM) takes a vital role in connecting the electric and optical fields. Folded thin-film lithium niobate modulator based on a poled Mach Nat. Technol. In the past decade, photonic-crystal EOMs have been developed on various material platforms such as silicon32,33,34, GaAs35, InP36, polymers37,38, ITO39, etc. The research is published in the journal Optica. Lithium niobate modulator | Laser Focus World g Simulated optical mode field profile of the second-order TE-like cavity mode \({\mathrm{{TE}}}_{01}^{1}\). 1e) is still able to produce a well-confined point-defect cavity, with a simulated optical Q of ~105 for the fundamental transverse-electric-like (TE-like) cavity mode, \({\mathrm{{TE}}}_{01}^{0}\), shown in Fig. Although the breaking of the mirror symmetry along the normal direction of the device plane considerably alters the band gap of the photonic crystal (Fig. & Lonar, M. Monolithic ultra-high-Q lithium niobate microring resonator. Phys. Increasing the electrical driving power now does not perturb the positions of the resonance dips, but rather changes their relative magnitudes since the magnitudes of the created sidebands depends on the driving amplitude48. A typical design requires a full air cladding to improve the optical quality factor43,45,46. Lett. When the modulation frequency is increased to 2.0GHz greater than the cavity linewidth, the cavity is too slow to follow the electro-optic modulation, which results in the frequency conversion of photons into sidebands with frequency separation equal to the modulation frequency. Correspondence to The inset of a shows the measured normalized transmission (NT) on a logarithmic scale, revealing an extinction ratio of 30 dB. You are using a browser version with limited support for CSS. Wolf, S. et al. On the other hand, lithium niobate electro-optic modulators, the workhorse of the optoelectronic industry for decades9, have been challenging to integrate on-chip because of difficulties in microstructuring lithium niobate. Here the modulator is analyzed in a dual-drive design shown in Figure 1 (where V1 = -V2). 1e) to achieve a critical coupling. c Detailed spectrum (blue) with RF driving signal at 2.0GHz with a power of 16mW. Li, M. et al. Lu, H. et al. Ultra-high-linearity integrated lithium niobate electro-optic modulators Input Requirements LiNbO 3 b Detailed transmission spectrum of the fundamental TE-like cavity mode \({\mathrm{{TE}}}_{01}^{0}\) at a wavelength of 1554.47nm, with the experimental data shown in blue and the theoretical fitting shown in red. IEEE 94, 952985 (2006). and JavaScript. Figure 1: Dual-drive system layout & Mitchell, A. a Recorded transmission spectra of the \({\mathrm{{TE}}}_{01}^{0}\) cavity mode with RF driving signal at seven different powers from 0 to 12mW, with a power step of 2mW, modulated at 0.6GHz. IEEE J. Quantum Electron. Photon-level tuning of photonic nanocavities. Deep learning with coherent nanophotonic circuits. 1d and8a). Lithium niobate, as a traditional multifunctional material, has stimulated a photonics revolution as silicon did for electronics. npj Quantum Information Lithium Niobate Electro-Optic Modulators, Fiber-Coupled (1260 nm - 1625 nm) Up to 40 GHz Lithium Niobate (LiNbO 3) Modulators Fiber-Coupled, High-Speed Modulation Intensity, Phase, or I/Q X-Cut or Z-Cut Devices LNP6118 40 GHz Phase Modulator with Polarizer, Z-Cut LN81S-FC 10 GHz Intensity Modulator, X-Cut LNLVL-IM-Z https://doi.org/10.1038/s41586-018-0551-y, DOI: https://doi.org/10.1038/s41586-018-0551-y. B. 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